Gas measurements play a critical role in both maximising product yield through trace contaminant detection, and ensuring the health and safety of employees and the general public. In addition, the wider environment is also protected from potentially harmful emissions. The monitoring of process and purge gas purity, the determination of trace level impurities within the cleanroom environment, and during deposition, etch, and cleaning operations, combine to optimise production process efficiency, and minimise losses. Meanwhile, emission of harmful substances to the atmosphere is prevented via monitoring and control of abatement facilities, as well as continuous measurement at the fenceline. MIRICO’s novel, mid-infrared products represent a powerful step forward in gas measurement technology, providing sensitive, continuous, and robust solutions for the full range of critical measurement points associated with the fabrication of semiconductor devices.